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Area Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection / Materials for Surface Acoustic Wave (SAW) devices

IEV ref 561-07-36

en
thickness variation for five points
TV5
difference between the maximum thickness and the minimum thickness at the centre and four peripheral points of the wafer as shown in Figure 1

Figure 1 – Wafer sketch and measurement points


fr
variation d’épaisseur pour cinq points, f
TV5, f
différence entre l’épaisseur maximale et l’épaisseur minimale au centre et en quatre points périphériques de la plaquette, comme indiqué Figure 1

Figure 1 – Croquis de plaquette et points de mesure


ar
تباين السمك لخمس نقاط

de
Schwankung der Dicke an fünf Punkten, f
TV5

es
variación de espesor para cinco puntos

it
variazione dello spessore per cinque punti
TV5

ko
5점 두께 변화

ja
TV5

pl
zmienność grubości dla pięciu punktów, f
TV5

pt
variação de espessura para cinco pontos

zh
五点厚度偏差
TV5

Publication date: 2021-08
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