International
Electrotechnical
Commission
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Area
Piezoelectric, dielectric and electrostatic devices and associated materials for frequency control, selection and detection
/ Materials for Surface Acoustic Wave (SAW) devices
IEV ref
561-07-36
en
thickness variation for five points
TV5
difference between the maximum thickness and the minimum thickness at the centre and four peripheral points of the wafer as shown in Figure 1
Figure 1 – Wafer sketch and measurement points
fr
variation d’épaisseur pour cinq points
, f
TV5
, f
différence entre l’épaisseur maximale et l’épaisseur minimale au centre et en quatre points périphériques de la plaquette, comme indiqué Figure 1
Figure 1 – Croquis de plaquette et points de mesure
ar
تباين السمك لخمس نقاط
de
Schwankung der Dicke an fünf Punkten, f
TV5
es
variación de espesor para cinco puntos
it
variazione dello spessore per cinque punti
TV5
ko
5점 두께 변화
ja
TV5
pl
zmienność grubości dla pięciu punktów, f
TV5
pt
variação de espessura para cinco pontos
zh
五点厚度偏差
TV5
Publication date:
2021-08
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