Note 1 to entry: There are many examples of micropumps mainly fabricated on silicon or glass, for instance, and using micromachining technology to form a diaphragm together with an actuator. Application examples include a diaphragm-type pump with a microscopic check valve driven by a piezoelectric element, and an integrated pump using a thermal expansion actuator along with a microheater. Pumps discharging and sucking fluids by deforming a diaphragm actuated by a stacked piezoelectric actuator can control the rate by changing the frequency of the actuator drive. In addition, pulsation-damping pumps can control the fluid flow with a high accuracy by using a dual pump along with a synchronous buffer pump.