IEVref:523-05-06ID:
Language:enStatus: Standard
Term: LIGA process
Synonym1:
Synonym2:
Synonym3:
Symbol:
Definition: process for creating a microstructure that can be used as a mould by using deep lithography, based on X-rays followed by electroforming

Note 1 to entry: LIGA is an acronym for Lithographie, Galvanoformung und Abformung, the German for lithography, electroforming, and moulding. Characteristics of the LIGA process include the ability to mass-produce high aspect-ratio microstructures with a line width of 1 µm to 10 µm and a height of several hundreds of micrometres, to allow the use of a wide range of materials including plastics, metals, and ceramics, and to be combined with silicon semiconductor elements, etc.


Publication date:2018-12
SourceIEC 62047-1:2016, 2.5.13, modified – The definition has been rewritten.
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5: