| |
IEVref: | 841-34-09 | | ID: |
Language: | en | | Status: Standard |
| | | |
Term: | plasma assisted chemical vapour deposition treatment
|
Synonym1: | PACVD (abbreviation)
[Preferred] | | |
Synonym2: | | | |
Synonym3: | | | |
Symbol: |
|
Definition: | CVD treatment combined with electric activation of gaseous media in conditions of abnormal glow discharge
|
Publication date: | 2004-09 |
Source | |
Replaces: | |
Internal notes: | |
CO remarks: |
|
TC/SC remarks: | |
VT remarks: | |
Domain1: | |
Domain2: | |
Domain3: | |
Domain4: | |
Domain5: | |