IEVref:
561-07-11
ID:
Language:
en
Status:
Obsolete
Term:
FQA
Synonym1:
fixed quality area
Synonym2:
Synonym3:
Symbol:
Definition:
central area of a wafer surface, defined by a nominal edge exclusion, X, over which the specified values of a parameter apply
Publication
date
:
2014-11
Source
Replaces:
Internal notes:
CO remarks:
TC/SC remarks:
VT remarks:
Domain1:
Domain2:
Domain3:
Domain4:
Domain5:
central area of a wafer surface, defined by a nominal edge exclusion, X, over which the specified values of a parameter apply