IEVref:523-01-02ID:
Language:enStatus: Standard
Term: MST
Synonym1: microsystem technology
[Preferred]
Synonym2:
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Definition: technology to realize microelectrical, optical and mechanical systems and their components by using micromachining

Note 1 to entry: The term "MST" is mostly used in Europe.

Note 2 to entry: This note applies to the French language only.


Publication date:2018-12
SourceIEC 62047-1:2016, 2.1.2
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