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IEVref:561-07-18ID:
Language:enStatus: Obsolete
Term: LTV
Synonym1: local thickness variation
[Preferred]
Synonym2:
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Definition: difference between the highest and lowest points within each site of a clamped wafer

Note 1 to entry: A site map example is shown in Figure 23. The value is always a positive number and is defined for each site as the difference between the highest and lowest points within each site, as shown in Figure 24. For a wafer to meet a local thickness variation specification, all sites must have local thickness variation values less than the specified value.

Note 2 to entry: This note applies to the French language only.

NOTE All sites have their centres within the fixed quality area.

Figure 23 – Example of site distribution for local thickness variation measurement

NOTE Local thickness variation is a positive number.

Figure 24 – Local thickness variation measured at each site


Publication date:2014-11
Source:
Replaces:
Internal notes:2016-02-22: Figures replaced by newly generated smaller versions. JGO
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