IEVref:511-01-13ID:
Language:enStatus: Standard
Term: nano-electromechanical system
Synonym1: NEMS
[Preferred]
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Definition: nanoscale device or embedded system involving one or more electronic and non-electronic components enabling the integration of electric and mechanical functionality of the system

Note 1 to entry: The components can be organic, inorganic or hybrid nanotechnology-based and function on the nanoscale for sensing, actuation, signal processing, display, or control.

Note 2 to entry: The components can be micro- or nano-machined to produce free surfaces and volumes that will be able to couple with the environment so that a physical, optical, chemical, or biological phenomenon is transduced to an electric signal.


Publication date:2018-04
SourceIEC TS 80004-9:2017, 3.1.3, modified – In the definition "of this interface" has been deleted since no interface is referred to earlier in the definition. In Note 2 to entry, the sentence has been redrafted for clarity: "an electric transduction" has been deleted and "produced" has been replaced by "transduced to an electric signal".
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