IEVref:523-08-02ID:
Language:enStatus: Standard
Term: MOEMS
Synonym1: micro-optical-electromechanical systems
Synonym2:
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Symbol:
Definition: application of MEMS technology in the field of optics

Note 1 to entry: This note applies to the French language only.


Publication date:2018-12
SourceIEC 62047-1:2016, 2.8.3
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