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IEVref:561-07-38ID:
Language:enStatus: Obsolete
Term: warp
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Definition: deformation of an unclamped wafer, defined as the maximum difference between a point on the front surface and a reference plane

Figure 27 – Schematic diagram of warp

Note 1 to entry: The reference plane is defined by three points as described in 561-07-27, Note 1 to entry, item 2. Warp is a bulk property of a wafer and not of the exposed surface alone.


Publication date:2014-11
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Internal notes:2016-02-22: Figures replaced by newly generated smaller versions. JGO
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