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IEVref:561-07-12ID:
Language:enStatus: Standard
Term: FPD
Synonym1: focal plane deviation
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Definition: maximum distance between a point on the wafer surface (within the fixed quality area) and the focal plane

Note 1 to entry: If that point is above the reference, the focal plane deviation is positive. If that point is below the reference plane, the focal plane deviation is negative


Publication date:2014-11
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