| Definition: | microsized device, in which sensors, actuators, transducers, resonators, oscillators, mechanical components and/or electric circuits are integrated
Note 1 to entry: Related technologies are extremely diverse from fundamental technologies such as design, material, processing, functional element, system control, energy supply, bonding and assembly, electric circuit, and evaluation to basic science such as micro-science and engineering as well as thermodynamics and tribology in a micro-scale. If micro-electromechanical devices constitute a system, it is sometimes called a MEMS, which is an acronym standing for "micro-electromechanical systems".
|