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IEVref:841-34-13ID:
Language:enStatus: Standard
Term: physical vapour deposition treatment
Synonym1: PVD (abbreviation)
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Definition: production process of a superconducting thin film by mainly using physical evaporation

NOTE – PVD process mainly constitutes a thin film by using vacuum evaporation of atomic species or sputter deposition using single or multiple targets in inert or reactive atmospheres, e.g. ion beam sputtering.


Publication date:2004-09
Source:815-05-13 MOD
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